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Auger Electron Spectroscopy (AES, Auger)

Auger electron spectroscopy (AES) is a surface analytical technique that utilizes an incident electron beam as an excitation source. Atoms that are excited by the electron beam can relax under the emission of "Auger" electrons. AES can be used for determining the composition of a surface, mapping the spatial distribution of the surface constituents, and obtaining an in-depth profile of these constituents into the bulk of the material. Auger is an ideal tool for analyzing small features such as particles, small diameter wires, bonding pads, etc.  It is an excellent technique for analyzing contamination, stains and passivation layers among other things. 

Auger Technical Capabilities

• Signal Detected: Auger electrons from near surface atoms
• Elements Detected: Li-U
• Detection Limits: 0.1 – 1 at% sub-monolayer

Applications for Auger Analysis

• Defect analysis
• Particle analysis
• Surface analysis
• Small-area depth profiling
• Process control
• Thin film analysis composition

Relevant Industries for Auger Analysis

• Aerospace
• Biomedical
• Data storage
• Defense
• Displays
• Electronics
• Semiconductor
• Telecommunications

Strengths

• Small area analysis (as small as 30 nanometers)
• Semi-quantitatively analysis
• Excellent surface sensitivity
• Good depth resolution

Limitations

• Standards required for best quantification
• Insulators are difficult
• Samples must be vacuum compatible
• Relatively poor detection sensitivity (0.1 at% at best)