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SPM/AFM (Scanning Probe Microscopy /Atomic Force Microscope)
Scanning Probe Microscopy/Atomic Force Microscopy (SPM/AFM)
AFM (Atomic Force Microscopy) is the most common instrument to observe atomic or near-atomic-resolution surface topography, utilizing the atomic force between a probe and the sample surface. The AFM consists of a cantilever with a sharp tip (probe) at its end, and when the tip scans the sample surface, forces between the tip and the sample surface lead to a deflection of the cantilever according to Hooke's law. The deflection is measured using a laser spot reflected from the top surface of the cantilever into an array of photodiodes, where the laser signal is transformed into electricity. By detecting the electricity changes, the computer can give 2-or 3-dimensional topography information of the sample surface.
SPM/AFM
Technical Capabilities
Signal Detected:
Topography
Depth Resolution:
0.1 Angstrom
Imaging/Mapping:
Yes
Lateral Resolution/Probe Size:
15 - 50 Angstroms
Ideal Uses for SPM & AFM Analysis
- Three-dimensional surface topographic imaging, including surface roughness, grain size, step height, and pitch
- Imaging of other sample characteristics, including magnetic field, capacitance, friction, and phase
Relevant Industries for SPM & AFM Analysis
- Aerospace
- Automotive
- Biomedical/biotechnology
- Compound Semiconductor
- Data Storage
- Defense
- Displays
- Electronics
- Industrial Products
- Lighting
- Pharmaceutical
- Photonics
- Polymer
- Semiconductor
- Solar Photovoltaics
- Telecommunications
Strengths of SPM & AFM Analysis
- Quantifying surface roughness
- Whole wafer analysis (150, 200, 300 mm)
- High spatial resolution
- Imaging of conducting and insulating samples
Limitations of SPM & AFM Analysis
- Scan range limits: 100 microns laterally and 5 microns in z direction
- Potential problems with samples that are too rough and oddly shaped
- Tip-induced errors possible